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GOLD EVAPORATIVE SOURCES WITH REDUCED CONTAMINANTS AND METHODS FOR MAKING THE SAME

机译:减少污染物的黄金蒸发源及其制备方法

摘要

A unique sequence of steps is provided to reduce contaminants along one or more surfaces and faces of gold evaporative sources without deleteriously impacting the structure of the gold evaporative sources. Edges are deburred; contaminants are successfully removed therealong; and surface smoothness is substantially retained. The resultant gold evaporative source is suitable for use in evaporative processes as a precursor to gold film deposition without the occurrence or a substantial reduction in the likelihood of spitting by virtue of significantly reduced levels of contaminants, in comparison to gold evaporative sources subject to a standard cleaning protocol.
机译:提供了独特的步骤顺序以减少沿金蒸发源的一个或多个表面和面的污染物,而不会有害地影响金蒸发源的结构。边缘被去毛刺;沿此成功清除了污染物;并且基本上保持了表面光滑度。与符合标准的金蒸发源相比,所产生的金蒸发源适合用作蒸发工艺中的金膜沉积前驱物,而不会由于污染物水平的显着降低而出现或大幅减少飞溅的可能性。清洁协议。

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