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GOLD EVAPORATIVE SOURCES WITH REDUCED CONTAMINANTS AND METHODS FOR MAKING THE SAME
GOLD EVAPORATIVE SOURCES WITH REDUCED CONTAMINANTS AND METHODS FOR MAKING THE SAME
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机译:减少污染物的黄金蒸发源及其制备方法
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摘要
A unique sequence of steps is provided to reduce contaminants along one or more surfaces and faces of gold evaporative sources without deleteriously impacting the structure of the gold evaporative sources. Edges are deburred; contaminants are successfully removed therealong; and surface smoothness is substantially retained. The resultant gold evaporative source is suitable for use in evaporative processes as a precursor to gold film deposition without the occurrence or a substantial reduction in the likelihood of spitting by virtue of significantly reduced levels of contaminants, in comparison to gold evaporative sources subject to a standard cleaning protocol.
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