PARTICLE BEAM IRRADIATION DEVICE, AND DOSE MONITORING METHOD OF CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a particle beam irradiation device and a dose monitoring method of a charged particle beam, capable of measuring a dose of a charged particle beam irradiated onto an irradiation object with higher accuracy than hitherto, even when beam current intensity is changed.;SOLUTION: A plurality of amplifiers 8b3-1 to 8b3-3 having each different gain for amplifying a charge signal are provided, and a pulse counter 8b3-4 is provided on each of the amplifiers 8b3-1 to 8b3-3 provided plurally, and a cumulative dose is monitored with a preset value relative to each gain.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2016,JPO&INPIT