SUCK-BACK VALVE, SUCK-BACK VALVE SYSTEM AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent deterioration of process liquid and to easily and exactly execute a desired suck-back motion by a simple operation.;SOLUTION: In a suck-back valve 200, first, second, third, fourth and fifth positions p1, p2, p3, p4, p5 are set on an axis CA in this order from an internal space SP1. A moving member 240 moves between the fourth and the fifth positions p4, p5 by supply or non-supply of the air to one flow channel PT1. When the moving member 240 is at the fourth position p4, a moving member 220 moves between the first and the second positions p1, p2 by supply or non-supply of the air to the other flow channel PT2. When the moving member 240 is at the fifth position p5, the moving member 220 moves between the first and the third positions p1, p3 by supply or non-supply of the air to the other flow channel PT2. A diaphragm 224 is attached to the moving member 220. Resist liquid flows in a circulation space SPc at a lower part of the diaphragm 224.;SELECTED DRAWING: Figure 6;COPYRIGHT: (C)2016,JPO&INPIT