POLISHING DEVICE, JIG FOR MEASURING ABRASIVE PAD PROFILE, AND METHOD FOR MEASURING ABRASIVE PAD PROFILE

摘要

PROBLEM TO BE SOLVED: To measure a profile of a surface shape of an abrasive pad in a short time and with a good accuracy.SOLUTION: A first polishing device includes: a polishing table 30A to which an abrasive pad 10 for polishing a polishing object is bonded; a drive part for driving rotation of the polishing table 30A; a top ring 31A which holds the polishing object and presses the object onto the abrasive pad 10; and a line laser sensor 300 which is so disposed as to face the abrasive pad 10, irradiates a surface of the abrasive pad 10 with laser beam in a line form and measures a profile of a surface shape of the abrasive pad 10 on the basis of reflection laser beam reflected from the abrasive pad 10.