METHOD FOR MANUFACTURING INTERFERENCE FILTER, INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an interference filter by which generation of hillocks or whiskers can be suppressed, an interference filter, an optical filter device, an optical module, and electronic equipment.;SOLUTION: A method for manufacturing a wavelength variable interference filter is provided, where the filter includes a fixed substrate, a fixed reflection film 54 provided on the fixed substrate, and a movable reflection film opposing to the fixed reflection film 54. The method includes carrying out the following steps: a reflection film formation step of forming the fixed reflection film 54 on the fixed substrate (first glass substrate M1) by using a metal material; and a deformation step (heating step) of deforming the fixed substrate (first glass substrate M1) by bending in a direction to allow a surface where the fixed reflection film 54 is formed to protrude.;COPYRIGHT: (C)2016,JPO&INPIT