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LIGHT BEAM EXPOSURE DEVICE, ELECTRONIC EQUIPMENT INCLUDING LIGHT BEAM EXPOSURE DEVICE, AND OPERATION METHOD OF LIGHT BEAM EXPOSURE DEVICE
LIGHT BEAM EXPOSURE DEVICE, ELECTRONIC EQUIPMENT INCLUDING LIGHT BEAM EXPOSURE DEVICE, AND OPERATION METHOD OF LIGHT BEAM EXPOSURE DEVICE
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机译:光束曝光设备,包括光束曝光设备的电子设备以及光束曝光设备的操作方法
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摘要
PROBLEM TO BE SOLVED: To suppress a change in a shape profile of an exposure area, which is attributable to a deviation of each exposing position, when plural light beams are radiated to plural exposing positions and each pixel of image data exhibits a luminance value of a three or more-valued gray level.SOLUTION: A light beam exposure device 20 includes a light emitting unit that generates plural light beams which are radiated to different exposing positions that are mutually adjacent along a sub-scan direction on an object, and sweeps the plural light beams in a main scan direction, and an image processing circuit 21 that corrects a luminance value of each of pixels of image data and transmits the resultant image data to the light emitting unit. Based on exposing position information representing a deviation of each of the exposing positions from each of reference positions equidistantly juxtaposed along the sub-scan direction on the object, the image processing circuit 21 corrects the luminance value of each of pixels associated with the respective exposing positions so as to suppress a change in a shape profile of an exposure area attributable to the deviation of each of the exposing positions. When the luminance value of a pixel that is an object of correction exceeds a maximum luminance value because of correction and a pixel adjoining the pixel that is an object of correction exhibits a minimum luminance value, the luminance value of the adjoining pixel is increased.SELECTED DRAWING: Figure 1
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