LTGA, MANUFACTURING METHOD OF LTGA AND PIEZOELECTRIC ELEMENT OR SENSOR USING LTGA

摘要

PROBLEM TO BE SOLVED: To provide a technology for manufacturing LTGA (LaTaGaAlO) where a part of Ga of langatate is substituted by Al and an LTGA fired body having higher purity than conventional articles.SOLUTION: There is provided a manufacturing method of an LTGA sintered body including weighting La(NO)6HO, which is lanthanum nitrate hydrate, Al(NO)9HO, which is aluminum nitrate hydrate, TaO, which is tantalum oxide, Glycine, which is a hydrophilic organic compound as a reductant and gallium oxide GaO(S101 to S102), dissolving each raw material in distilled water and mixing them with stirring to conduct mixture adjustment (S105), heating them at predetermined temperature to solution combustion synthesize (S107), conducting the heat treatment on the burned product for example at a temperature about 1400°C for about 10 hours in air (S109) and providing an LTGA fired body having higher purity than conventional articles through the heating treatment (S110).SELECTED DRAWING: Figure 1