Method and technique for controlling MEMSDVC control waveforms for life improvement

摘要

The present invention generally relates to a method for minimizing the impact of a MEMS device on a contact surface while operating a MEMS DVC. By reducing the drive voltage during the pull-in motion of the MEMS device, the acceleration of the MEMS device toward the contact surface is reduced, the impact speed is reduced, and the damage caused by the MEMS DVC device is reduced.