MANUFACTURING METHOD OF SUBSTRATE WITH PIEZOELECTRIC THIN FILM, MANUFACTURING METHOD OF PIEZOELECTRIC ACTUATOR, MANUFACTURING METHOD OF INK JET HEAD, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INK JET HEAD AND INK JET PRINTER

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of device failure by recognizing whether or not a piezoelectric thin film has such film quality that device failure occurs due to reduction in adhesion and piezoelectric characteristics before device manufacture.SOLUTION: A manufacturing method of a substrate with piezoelectric thin film comprises a piezoelectric thin film forming step (S4) and an inspection step (S5). The film forming step forms a piezoelectric thin film having the perovskite structure on a ground layer including a substrate. The inspection step irradiates the piezoelectric thin film with light, and determines the quality of the piezoelectric thin film on the basis of the measurement result of diffusion light reflected on the piezoelectric thin film.SELECTED DRAWING: Figure 4