Method of making a mirror and a mirror for the Fabry-Perot interferometer

摘要

PROBLEM TO BE SOLVED: To provide a spectrometer including a Fabry-Perot interferometer.;SOLUTION: A method for manufacturing a mirror plate 100 for a Fabry-Perot interferometer 700 includes the steps of: disposing a base slab including a substrate covered with reflective multilayer coating; forming one or more intermediate layers 62 on the base slab, that is, a step of forming one or more intermediate layers 62 such that the lowermost intermediate layer 62 is substantially configured of silica (SiO₂), and that the multilayer coating is at least covered with the lowermost intermediate layer 62; forming one or more capacitance sensor electrodes 90 by depositing conductive materials at the uppermost part of the intermediate layers 62; and removing the materials of the lowermost intermediate layer 62 by etching for forming an exposed opening portion AP1 of the multilayer coating.;COPYRIGHT: (C)2015,JPO&INPIT