Microwave ion source, and the adjustment device of the microwave ion source

摘要

PROBLEM TO BE SOLVED: To provide a microwave ion source in which the volume of a vacuum chamber for plasma generation is adjustable, and to provide an adjustment device therefor.;SOLUTION: A microwave ion source 10 comprises: a plasma chamber 11 including an inlet end 17 connected with a microwave waveguide 20, an outlet end 18 having an ion extraction aperture 21, and a sidewall 19 for connecting the inlet end 17 and outlet end 18, and having a fixed length in the axial direction from the inlet end 17 to the outlet end 18; a microwave introduction window 12 for partitioning a part on the ion extraction aperture 21 side of the plasma chamber 11 into a vacuum chamber 13 for plasma generation; and a positioning member for positioning the microwave introduction window 12 in a place separated from the inlet end 17 on the axial inside.;COPYRIGHT: (C)2014,JPO&INPIT