Electronic industrial process wastewater recovery method and recovery device

摘要

PROBLEM TO BE SOLVED: To efficiently treat process wastewater from electronic industry and obtain recovered water of high water quality in which a TOC (total organic carbon) value is sufficiently reduced in a method for recovering electronic industry process wastewater in which biological treatment as a former stage of reverse osmosis (RO) membrane separation treatment is omitted.SOLUTION: Process wastewater containing low molecular weight organic substances from an electronic industry process is subjected to suspended solid removal treatment by a suspended solid removal treatment means 1 and then to treatment by an RO membrane separator 2 and further RO membrane permeated water is made to pass through a biological activated carbon tower 3 with microorganism carrying amount of 10/g-activated carbon or more to carry out biological activated carbon treatment. The Low molecular weight organic substances in the RO membrane permeated water can be efficiently removed by the biological activated carbon tower 3 and consequently the recovered water with sufficiently reduced TOC value can be stably obtained for a long period of time.