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Lithographic apparatus, apparatus for providing setpoint data, device manufacturing method, method for providing setpoint data, and computer program
Lithographic apparatus, apparatus for providing setpoint data, device manufacturing method, method for providing setpoint data, and computer program
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机译:光刻设备,用于提供设定点数据的设备,装置制造方法,用于提供设定点数据的方法和计算机程序
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摘要
An apparatus or method to calculate target dose values of a plurality of radiation beams at a plurality of different times in order to form a desired dose pattern on a target, each target dose value defining the dose distribution of a spot exposure formed by the radiation beam to which the target dose value is applied, wherein a nominal position of a characteristic point in the dose distribution of each of the spot exposures lies at a point of a spot exposure grid, and to provide target dose values at the resolution of the spot exposure grid by calculating target dose values at grid points on a lower resolution grid, the lower resolution grid having a resolution lower than the spot exposure grid, and for each of the calculated target dose values, deriving a target dose value at each of a plurality of points in the spot exposure grid.
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