CORRECTION METHOD FOR ACCELERATION VOLTAGE DRIFT, DRIFT CORRECTION METHOD FOR CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM LITHOGRAPHY DEVICE

摘要

PURPOSE: To provide a method capable of correcting drift of an acceleration voltage.;CONSTITUTION: A correction method for acceleration voltage drift includes the steps of: measuring a second adjustment value in the case where a focal position of a charged particle beam is adjusted again after the lapse of a predetermined time from the adjustment of the focal position of the charged particle beam with a first adjustment value; calculating a deviation amount between the first and second adjustment values; calculating a correction value, corresponding to the deviation amount, of the acceleration voltage to be applied to a beam source that emits the charged particle beam, by using a correlation stored in a storage device; and correcting the acceleration voltage to be applied to the beam source by using the correction value.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT