CORRECTION METHOD OF ACCELERATION VOLTAGE DRIFT, DRIFT CORRECTION MEHTOD OF CHARGED PARTICLE BEAM AND CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS

摘要

According to one aspect of the present invention, a correction method of an acceleration voltage drift comprises: a step of adjusting a focal point of a charged particle beam by a first adjustment value and measuring a second adjustment value when the focal point of the charged particle beam is adjusted after a pre-determined time has passed; a step of calculating a deviation amount of the first and second adjustment values; a step of calculating a corrected value of an acceleration voltage applied to a beam source emitting the charged particle beam corresponding to the deviation amount by using a correlation stored in a storage device; and a step of correcting the acceleration voltage applied to the beam source by using the corrected value. According to the present invention, an adjustment item is substantially reduced and throughput degradation may be restrained.;COPYRIGHT KIPO 2016