Position adjustment jig, the machine tool having a chuck device comprising the same, tester provided with a chucking device comprising the same, and, deformable member used therewith

摘要

PROBLEM TO BE SOLVED: To provide a positioning tool capable of suitably adjusting the axis of a work which is small in axial size without damaging the work, and a deformable member used for the positioning tool, a machine tool or an inspection unit.;SOLUTION: A deformable member 113 has a substantially annular shape. The deformable member 113 has a plurality of outer slits 138 and a plurality of inner slits 139 formed at an inclined part 132. The outer slits 138 extend in radial directions of the deformable member 113 from an outer peripheral edge 131 toward an inner peripheral edge 133 of the deformable member 113. The inner slits 139 extend in radial directions from the inner peripheral edge 133 toward the outer inner peripheral edge 131 of the deformable member 113. At the inclined part 132, the outer slits 138 and inner slits 139 which are as many as each other are formed, and arranged at equal intervals alternately in a circumferential direction of the deformable member 113.;COPYRIGHT: (C)2014,JPO&INPIT