The present invention provides a method of inspecting a substrate container including a plurality of slots vertically supporting a peripheral edge of a substrate. This inspection method comprises a mounting step of placing the substrate container on a mounting table and a step of moving the sensor horizontally by a first arm mechanism into a space of an empty slot adjacent to a measurement target slot into which the substrate is inserted , A measuring step of measuring the position of the substrate, and a replacement step of extracting the substrate from the measurement target slot by the second arm mechanism and replacing the substrate with another slot, wherein the measurement The measurement step and the replacement step are iterated until completion of the measurement step.
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