RARE EARTH THIN FILM MAGNET, MANUFACTURING METHOD THEREOF, AND TARGET FOR RARE EARTH THIN FILM MAGNET FORMATION

摘要

PROBLEM TO BE SOLVED: To provide: a rare earth thin film magnet which has a good magnetic property, and is superior in mass productivity and reproducibility; a method for manufacturing such a rare earth thin film magnet; and a target for forming such a rare earth thin film magnet.;SOLUTION: A target used in a film growth by a pulse laser deposition method is optimized in composition and pulse laser intensity's density. A rare earth thin film having a nanocomposite structure in which α-Fe phase and Nd2Fe14B phase are alternately arranged in three dimensions is grown from a piece of the target composed of a single phase.;COPYRIGHT: (C)2016,JPO&INPIT