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Method and apparatus for plasma nitrided gate dielectrics using radio frequency energy which is amplitude-modulated
Method and apparatus for plasma nitrided gate dielectrics using radio frequency energy which is amplitude-modulated
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机译:使用振幅调制的射频能量进行等离子体氮化的栅极电介质的方法和装置
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摘要
A method and apparatus for forming a nitrided gate dielectric layer. The method includes generating a nitrogen-containing plasma in a processing chamber via a smooth-varying modulated RF power source to reduce electron temperature spike. Field effect transistor channel mobility and gate leakage current results are improved when the power source is smooth-varying modulated, as compared to square-wave modulated.
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