The liquid immersion member, an immersion exposure apparatus, device manufacturing method, and an immersion exposure method

摘要

In the immersion exposure apparatus, an optical element, and the liquid immersion member is disposed at least partly around the optical path of the exposure light passing through the first liquid between an object and the optical member. Is disposed at least partly around the optical path, the liquid immersion member, the first of the first liquid on the exit side of the optical member the optical path of the exposure light between the object and the optical member to be filled with the first liquid a first liquid immersion member which forms a liquid immersion space, and a guide portion for guiding the first guiding space is a portion of the periphery of the optical path, at least a portion of the first liquid of the first liquid immersion space, with respect to the optical path It is located outside the first liquid immersion member Te, the part of the periphery of the first liquid immersion space, and the second liquid immersion member adjacent to the first guiding space to form the second liquid immersion space of the second liquid and, I include a.