Glass regeneration processing method, recycled glass substrate, and photomask blanks and photomasks using the same

摘要

The present invention relates to a method of regenerating and recycling a photomask used in the production of various flat panels and a photomask that has become defective in the photomask manufacturing process for reuse as a new glass substrate for photomask. The present invention relates to a glass substrate for a photomask regenerated by a processing method, a photomask blank and a photomask using the glass substrate. Recycled glass substrate with low defects and low defects by the process of homogenizing wettability so that the original pattern trace does not appear in the breath image inspection without performing the conventional physical polishing process on the surface of the recycled glass substrate Makes it possible to obtain