Method of manufacturing the indium-made cylindrical target member and the cylindrical target member

摘要

PROBLEM TO BE SOLVED: To provide a cylindrical target member made of indium having a low oxygen concentration, and a production method of a cylindrical target member.;SOLUTION: In a production method of a cylindrical target member made of indium, when a raw material is inputted from a dissolver 1 into a cylindrical mold 3 and subjected to fusion casting, a molten metal is subjected to at least one operation among (1) rocking, (2) vibrating and (3) circulating to remove oxide slag, and then, the molten metal is cooled to form a target compact, and the surface of the compact is cut. The oxygen concentration is 50 mass ppm or less, and the average crystal grain size of the whole surface is 30 mm or less.;COPYRIGHT: (C)2014,JPO&INPIT