首页> 外国专利> CYLINDRICAL SPUTTERING TARGET CYLINDRICAL COMPACT MANUFACTURING METHOD OF CYLINDRICAL SPUTTERING TARGET MANUFACTURING METHOD OF CYLINDRICAL SINTERED COMPACT AND MANUFACTURING METHOD OF CYLINDRICAL COMPACT

CYLINDRICAL SPUTTERING TARGET CYLINDRICAL COMPACT MANUFACTURING METHOD OF CYLINDRICAL SPUTTERING TARGET MANUFACTURING METHOD OF CYLINDRICAL SINTERED COMPACT AND MANUFACTURING METHOD OF CYLINDRICAL COMPACT

机译:圆柱溅射圆柱形溅射圆柱形圆柱形圆柱形圆柱形圆柱形烧结靶制造方法的圆柱形紧凑型圆柱形紧凑型制造方法

摘要

An object of the present invention is to provide a cylindrical sputtering target with little deformation and high strength, a cylindrical sintered body, a cylindrical shaped body, and a method for manufacturing the same. Another object of the present invention is to provide a cylindrical sputtering target with high homogeneity, a cylindrical sintered body, a cylindrical shaped body, and a method for manufacturing the same. The sputtering target by one Embodiment of this invention has a cylindrical sintered compact, The relative density of a cylindrical sintered compact is 99.7 % or more and 99.9 % or less. In addition, the cylindrical sputtering target has a plurality of cylindrical sintered bodies adjacent to each other through a predetermined space, and the difference in relative density between the adjacent plurality of cylindrical sintered bodies may be 0.1% or less.
机译:本发明的一个目的是提供一种具有很小变形和高强度,圆柱形烧结体,圆柱形主体的圆柱形溅射靶,以及制造方法。 本发明的另一个目的是提供一种具有高均匀性,圆柱形烧结体,圆柱形主体的圆柱形溅射靶,以及制造方法。 本发明的一个实施方案的溅射靶具有圆柱形烧结体,圆柱形烧结体的相对密度为99.7%或更高,99.9%或更低。 另外,圆柱形溅射靶具有通过预定空间彼此相邻的多个圆柱形烧结体,并且相邻多个圆柱形烧结体之间的相对密度的差可以是0.1%以下。

著录项

  • 公开/公告号KR102336966B1

    专利类型

  • 公开/公告日2021-12-08

    原文格式PDF

  • 申请/专利权人 제이엑스금속주식회사;

    申请/专利号KR20170132666

  • 发明设计人 야마구치 요헤이;

    申请日2017-10-12

  • 分类号C23C14/34;C04B35/453;

  • 国家 KR

  • 入库时间 2022-08-24 22:40:39

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号