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Positive photosensitive resin composition, method for forming polyimide resin pattern, and patterned polyimide resin film

机译:正型感光性树脂组合物,聚酰亚胺树脂图案的形成方法以及图案化的聚酰亚胺树脂膜

摘要

Provided is a positive photosensitive resin composition containing a polyimide resin that allows patterns to be satisfactorily formed by means of photolithography, and provides patterns with excellent heat resistance. Further provided is a method for forming polyimide resin patterns using the positive photosensitive resin composition. Further provided is a patterned polyimide resin film formed by means of the method for forming polyimide resin patterns. To the photosensitive resin composition are added, an (A) polyimide resin, and a (B) compound in which an imidazole compound having a specific structure is generated by the action of light.
机译:提供一种包含聚酰亚胺树脂的正型光敏树脂组合物,该聚酰亚胺树脂允许通过光刻法令人满意地形成图案,并且提供具有优异的耐热性的图案。还提供了一种使用正型光敏树脂组合物形成聚酰亚胺树脂图案的方法。还提供了一种通过形成聚酰亚胺树脂图案的方法形成的图案化的聚酰亚胺树脂膜。向光敏树脂组合物中添加(A)聚酰亚胺树脂和(B)化合物,其中通过光的作用产生具有特定结构的咪唑化合物。

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