首页>
外国专利>
Positive photosensitive resin composition, method for forming polyimide resin pattern, and patterned polyimide resin film
Positive photosensitive resin composition, method for forming polyimide resin pattern, and patterned polyimide resin film
展开▼
机译:正型感光性树脂组合物,聚酰亚胺树脂图案的形成方法以及图案化的聚酰亚胺树脂膜
展开▼
页面导航
摘要
著录项
相似文献
摘要
Provided is a positive photosensitive resin composition containing a polyimide resin that allows patterns to be satisfactorily formed by means of photolithography, and provides patterns with excellent heat resistance. Further provided is a method for forming polyimide resin patterns using the positive photosensitive resin composition. Further provided is a patterned polyimide resin film formed by means of the method for forming polyimide resin patterns. To the photosensitive resin composition are added, an (A) polyimide resin, and a (B) compound in which an imidazole compound having a specific structure is generated by the action of light.
展开▼