Energy dispersive X-ray fluorescence analyzer

摘要

PROBLEM TO BE SOLVED: To provide an energy dispersive fluorescent X-ray analyzer capable of appropriately identifying the peak of characteristic X-rays obtained by an element to be measured even if the temperature is changed.;SOLUTION: An energy dispersive fluorescent X-ray analyzer comprises: an X-ray source 1 emitting excitation X-rays A including characteristic X-rays of an energy E1 generated from a target; a correcting body 8 for allowing the excitation X-rays A to generate characteristic X-rays of an energy E2 as corrected X-rays; a detector 4 for detecting fluorescent X-rays B generated from a sample simultaneously with the excitation X-rays A and the corrected X-rays; a pulse height analyzer 5; and an operation unit 6. The operation unit 6 corrects a relation between an energy value and a peak value, based on a peak value H1 at a peak apex on the basis of the characteristic X-rays of the energy E1 and a peak value H2 at a peak apex on the basis of the characteristic X-rays of the energy E2.;COPYRIGHT: (C)2014,JPO&INPIT