Substrate transport robot, the substrate transport system and a substrate transfer method

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer robot capable of accessing even a substrate mounting portion located at a farther position, without up-sizing the robot.;SOLUTION: A substrate transfer robot 13 includes a hand 131, an arm 132 for moving the hand 131, and a control unit 133 for controlling the movement of the hand 131. The control unit 133 is configured to control the position and orientation of the hand 131 so that the hand center line 139 inclines, in the plan view, for the access straight line 304 in a state where the substrate holding center 138 is located at an access start position 141 that is spaced a predetermined distance from a cassette 30, in the vicinity thereof, and the substrate holding center 138 reaches a substrate mounting position 142 in the cassette 30 in a state where the hand center line 139 matches the access straight line 304.;COPYRIGHT: (C)2015,JPO&INPIT