Microwave introducing mechanism, microwave plasma source and the microwave plasma processing apparatus

摘要

Microwave introduction mechanism (41), a tuner for antenna portion having (81) a plane antenna for radiating the chamber microwave (80), to the impedance matching (60), the heat of antenna units (80) The provided heat dissipating mechanism for dissipating and (90), tuner (60), a body which is a part of the microwave transmission line has a (53) and the inner conductor (52) outer conductor forming the cylindrical (51 has (61a, and 61b) slag) and is movable between the outer conductor (52) and the inner conductor (53), slag driving unit for moving a slug (70), the heat-dissipating structure (90 In), a heat pipe heat input end is located antenna portion (80), transported to the heat dissipation end of the heat input end heat antenna portion (80) and (91), the heat radiating portion provided on the heat radiating end (92 I and a).