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Resolution, single-pass image forming apparatus to scroll the image data for the improvement of the contrast and exposure range

机译:分辨率,单次通过图像形成设备,可滚动图像数据以改善对比度和曝光范围

摘要

An imaging (e.g., lithographic) apparatus for generating an elongated concentrated scan image on an imaging surface of a scan structure (e.g., a drum cylinder) that moves in a process (cross-scan) direction. The apparatus includes a spatial light modulator having a two-dimensional array of light modulating elements for modulating a two-dimensional light field in response to predetermined scan image data, and an anamorphic optical system is used to anamorphically image and concentrate the modulated light onto an elongated imaging region defined on the imaging surface. To avoid smearing, movement of the imaging surface is synchronized by an image position controller with the modulated states of the light modulating elements such that image features of the scan image are scrolled (moved in the cross-scan direction) at the same rate as the cross-scan movement of the imaging surface, whereby the features remain coincident with the same portion of the imaging surface.
机译:一种成像(例如,光刻)设备,用于在沿处理(交叉扫描)方向移动的扫描结构(例如,鼓筒)的成像表面上生成细长的集中扫描图像。该装置包括具有光调制元件的二维阵列的空间光调制器,该光调制元件用于响应于预定扫描图像数据来调制二维光场,并且变形光学系统用于对成像的图像进行变形成像并将其聚光到光源上。在成像表面上限定的细长成像区域。为了避免出现污点,成像表面的移动由图像位置控制器与光调制元件的调制状态进行同步,以使扫描图像的图像特征以与图像调制器相同的速率滚动(在交叉扫描方向上移动)。成像表面的交叉扫描运动,从而使特征与成像表面的相同部分保持一致。

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