Solution discharge amount measurement jig, the solution discharge amount measurement mechanism and the solution discharge amount measuring method

摘要

PROBLEM TO BE SOLVED: To measure an amount of a chemical solution discharged from a nozzle to a substrate without operator's manual work in a coating treatment apparatus which applies the chemical solution to the substrate.;SOLUTION: A chemical solution discharge amount measurement jig 1 mesures an amount of a chemical solution discharged from a supply nozzle to a substrate in a coating treatment apparatus which holds the substrate at a substrate holding part and discharges the chemical solution from the supply nozzle to the substrate held to perform coating treatment. The chemical solution discharge amount measurement jig 1 includes: a strain element 50 which is distorted by a load; a strain gauge 62 which is disposed at the strain element 50 and changes a resistance value according to a distortion amount; a lower substrate 51 which supports the strain element 50; and an upper substrate 52 which is supported by the strain element 50.;COPYRIGHT: (C)2014,JPO&INPIT