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THERMAL FLOW METER, TEMPERATURE MEASUREMENT DEVICE, AND THERMAL FLOW METER PROGRAM
THERMAL FLOW METER, TEMPERATURE MEASUREMENT DEVICE, AND THERMAL FLOW METER PROGRAM
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机译:热流量表,温度测量装置和热流量表程序
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摘要
A thermal flow meter is provided that can accurately correct zero point and span errors, which change depending on an ambient temperature, independently of a fluid type. The thermal flow meter includes: a flow path through which measuring target fluid flows; an upstream side electrical resistive element provided on the upstream side of the flow path; a downstream side electrical resistive element provided on the downstream side of the flow path; and a flow rate calculation part that calculates a flow rate of the measuring target fluid on the basis of an upstream side voltage that is a voltage applied to the upstream side electrical resistive element, a downstream side voltage that is a voltage applied to the downstream side electrical resistive element, and the thermal conductivity of the measuring target fluid.
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