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Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked Parallel Plate Waveguides
Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked Parallel Plate Waveguides
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机译:使用堆叠式平行平板波导的光学相控阵及制造堆叠式平行平板波导的阵列的方法
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摘要
A method for fabricating crystalline dielectric material on top of metal layers to produce an apparatus for non-mechanical steering of an input laser beam is provided. The apparatus may include a plurality of stacked parallel dielectric waveguides, each waveguide of which is fabricated by separating layers of dielectric material from a donor wafer and bonding the separated layers of dielectric material to a receiving wafer. A plurality of voltages is applied across the stacked parallel dielectric waveguides. Each of the stacked parallel dielectric waveguides is electrically phase modulated to deflect an output beam in a predictable manner.
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