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LIQUID FLOW CELLS HAVING GRAPHENE ON NITRIDE FOR MICROSCOPY
LIQUID FLOW CELLS HAVING GRAPHENE ON NITRIDE FOR MICROSCOPY
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机译:带有石墨烯的硝酸流动相显微镜
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摘要
This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.
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