PBNZT FERROELECTRIC FILM, SOL-GEL SOLUTION, FILM FORMING METHOD AND METHOD FOR PRODUCING FERROELECTRIC FILM

摘要

To provide a PBNZT ferroelectric film capable of preventing sufficiently oxygen ion deficiency. The PBNZT ferroelectric film according to an embodiment of the present invention is a ferroelectric film including a perovskite-structured ferroelectric substance represented by ABO₃, wherein the perovskite-structured ferroelectric substance is a PZT-based ferroelectric substance containing Pb²⁺ as A-site ions and containing Zr⁴⁺ and Ti⁴⁺ as B-site ions, and the A-site contains Bi³⁺ as A-site compensation ions and the B-site contains Nb⁵⁺ as B-site compensation ions.