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Defect Reduction Using Aspect Ratio Trapping
Defect Reduction Using Aspect Ratio Trapping
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机译:使用长宽比陷印减少缺陷
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摘要
Lattice-mismatched epitaxial films formed proximate non-crystalline sidewalls. Embodiments of the invention include formation of facets that direct dislocations in the films to the sidewalls.
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