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METHOD AND DEVICE FOR MEASURING LARGE-AREA AND MASSIVE SCATTERED FIELD IN NANOSCALE
METHOD AND DEVICE FOR MEASURING LARGE-AREA AND MASSIVE SCATTERED FIELD IN NANOSCALE
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机译:纳米尺度测量大面积和大散射场的方法和装置
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摘要
A device for measuring a large-area and massive scattered field in nanoscale. The device includes a polarization state generator disposed on an output optical path of a laser source, a polarization state analyzer operating to demodulate a polarized light beam emitted thereon, a first objective lens and a first lens disposed on an optical path of a sample stage, and a scanning mirror disposed on an optical path in front of or at the rear of the polarization state generator.
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