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Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method
Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method
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机译:膜沉积设备,基板处理设备,膜沉积方法和用于膜沉积方法的计算机可读存储介质
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摘要
There is disclosed a film deposition apparatus and a film deposition method for depositing a film on a substrate by carrying out cycles of supplying in turn at least two source gases to the substrate in order to form a layer of a reaction product, and a computer readable storage medium storing a computer program for causing the film deposition apparatus to carry out the film deposition method.
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