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Information acquiring apparatus and information acquiring method of acquiring information of sample by using terahertz wave

机译:利用太赫兹波获取样本信息的信息获取装置和信息获取方法

摘要

An information acquiring apparatus that acquires information of a sample includes an irradiation unit configured to irradiate an irradiation position of the sample with a terahertz wave through a transmission member being in contact with the sample; a detection unit configured to detect a terahertz wave reflected by the transmission member and a terahertz wave reflected by the sample; a waveform acquiring unit configured to acquire a time waveform of the terahertz wave reflected by the transmission member and a time waveform of the terahertz wave reflected by the sample, by using detection results of the detection unit; and an information acquiring unit configured to acquire the information of the sample by using the time waveform of the terahertz wave reflected by the transmission member, the time waveform of the terahertz wave reflected by the sample, and information relating to a thickness of the transmission member at the irradiation position.
机译:一种获取样本信息的信息获取装置,包括:照射单元,其通过与所述样本接触的透射构件,以太赫兹波照射所述样本的照射位置;以及检测单元,其被配置为检测由所述透射构件反射的太赫兹波和由所述样本反射的太赫兹波;波形获取单元,其被配置为通过使用检测单元的检测结果来获取由透射构件反射的太赫兹波的时间波形和由样本反射的太赫兹波的时间波形;信息获取单元,其被配置为通过使用由透射部件反射的太赫兹波的时间波形,由样品反射的太赫兹波的时间波形以及与透射部件的厚度有关的信息来获取样品的信息。在照射位置。

著录项

  • 公开/公告号US9316582B2

    专利类型

  • 公开/公告日2016-04-19

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号US201414225038

  • 发明设计人 SAYURI YAMAGUCHI;OICHI KUBOTA;

    申请日2014-03-25

  • 分类号G01N21/55;G01N21/3586;

  • 国家 US

  • 入库时间 2022-08-21 14:31:58

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