首页> 外国专利> Information acquiring apparatus and information acquiring method for acquiring information on specimen by using terahertz wave

Information acquiring apparatus and information acquiring method for acquiring information on specimen by using terahertz wave

机译:利用太赫兹波获取标本信息的信息获取装置和信息获取方法

摘要

An information acquiring apparatus that acquires information on a specimen by applying terahertz wave to the specimen through a plate-like member, the specimen being provided between a reflecting member having a reflecting surface and the plate-like member. The apparatus includes an applying unit that applies the terahertz wave to the specimen, a detecting unit that detects the terahertz wave reflected from the specimen, and an information acquiring unit that acquires the information on the specimen by using temporal waveforms acquired from a result of detection performed by the detecting unit, the information acquiring unit using at least a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the plate-like member and the specimen and a temporal waveform representing a portion of the terahertz wave that is reflected by an interface between the specimen and the reflecting surface of the reflecting member.
机译:一种信息获取设备,其通过将太赫兹波通过板状构件施加到样本上来获取关于样本的信息,样本被设置在具有反射面的反射构件与板状构件之间。该设备包括:将太赫兹波施加到样本的施加单元;检测从样本反射的太赫兹波的检测单元;以及信息获取单元,该信息获取单元通过使用从检测结果获取的时间波形来获取关于样本的信息。信息获取单元至少使用表示由板状构件和样本之间的界面反射的太赫兹波的一部分的时间波形和表示该太赫兹波的一部分的时间波形,该时间波形表示由板状构件和样本之间的界面反射的太赫兹波的一部分。试样和反射部件的反射面之间的界面反射该反射光。

著录项

  • 公开/公告号US9304082B2

    专利类型

  • 公开/公告日2016-04-05

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号US201414485453

  • 发明设计人 TAKAYUKI KOIZUMI;

    申请日2014-09-12

  • 分类号G01J5/02;G01N21/55;G01N33/48;G01N21/3586;G01N21/3563;G01N21/3581;

  • 国家 US

  • 入库时间 2022-08-21 14:28:16

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号