Serially-connected ball screw pair and piezoelectric actuator macro-micro driving and guiding device

摘要

A serially-connected ball screw pair and piezoelectric actuator macro-micro driving and guiding device includes, from the bottom to the top, a sliding seat (1), a ball screw pair, a sliding table guide rail pairs, a nut seat (6), a piezoelectric actuator (7), a micro-moving table, a nut seat guide rail pairs and a sliding table (1). The axis of a ball screw is symmetric with respect to two sliding table rail pairs, a nut (3) of the ball screw pair is fixedly mounted into the nut seat (6), one end of the piezoelectric actuator (7) is fixedly connected with the nut seat (6) and the other end thereof is fixedly connected with the micro-moving table (8), the axis of the piezoelectric actuator is symmetric relative to two sliding table rail pairs, an upper surface of the micro-moving table is fixedly mounted to a lower surface of the sliding table, and two nut rail pairs are symmetric relative to the axis of the ball screw. The ultra precision feeding in a long stroke within a full journey can be achieved; and the piezoelectric actuator only endures the driving force without enduring the driving torque generated by the driving force of the ball screw pair, thus, so that the piezoelectric actuator is in a good stressed status, which is applicable to a large-load ultra-precision feed system.