Measurement of the surface shape map of flat and curvy objects, independent of relative motions

摘要

A plurality of distance sensors are used to measure the surface shape map of objects in the presence of relative motions between the object and sensor in the measurement directions of the sensors. The method involves making multiple sequential measurements from a group of sensors while the object moves longitudinally relative to the sensors. The central idea of the invention is the observation that surface shape features appear in delayed sequence as the observed surface moves longitudinally relative to the sensor array, while any relative motions in the measurement directions appear simultaneously at all sensors. Mathematical procedures are used to identify the relative motions from within the measurements. These motions are then subtracted from the sensor reading to determine the surface shape map of the measured object. The invention can be applied to many different measurement types, including surface shape measurement of one- or multiple-sided generally flat objects, and surface shape measurement of more general three-dimensional objects.