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Measurement of line-edge-roughness and line-width-roughness on pre-layered structures
Measurement of line-edge-roughness and line-width-roughness on pre-layered structures
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机译:预层结构上的线边缘粗糙度和线宽粗糙度的测量
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摘要
Measurements of line roughness are separated into groups depending upon pre-layers. Image data collected from similar pre-layer types are considered together in order to separate effects of line roughness from distortion of measurements caused by the pre-layers. The resulting line roughness measurements are used to estimate an aspect of line quality.
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