Gas flow rate measuring apparatus for minimizing temperature dependent errors

摘要

A gas flow rate measuring apparatus including a gas flow rate detection circuit configured to output a first analog signal of a gas flow rate of a gas; a gas temperature detection element configured to output a second analog signal of a temperature of the gas or a temperature of an integrated circuit; analog-to-digital converters for converting the analog signals into respective digital signals; a digital signal correction device comprising a map table and configured to correct a characteristic bend of the first digital signal based on the map table and the second digital signal, wherein the map table comprises correction constants arranged as lattice points, wherein a first number of lattice points in a first region of the characteristic bend of the gas flow rate signal is larger than a second number of lattice points of a second region outside the first region of the characteristic bend.