microfilter, method of forming a microfilter and method of using a microfilter

摘要

microfilter, method of forming a microfilter and method of using a microfilter. The present invention relates to a microfilter comprising a polymer layer formed of photodefinable dry film and a plurality of apertures each extending through the polymer layer. Also disclosed is a method of forming a microfilter. the method includes providing a first layer of epoxy-based photodefinable dry film disposed on a substrate; exposing the first layer to energy through a mask to form a pattern, defined by the mask, on the first layer of dry film; forming, from the first dry film layer, a polymer layer having a plurality of apertures extending therethrough, the plurality of apertures having a pattern-defined distribution; and removing the substrate polymer layer.