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Low-temperature plasma source with possibility of both contact and contactless application and process for preparing sandwich structure for such a source
Low-temperature plasma source with possibility of both contact and contactless application and process for preparing sandwich structure for such a source
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机译:具有接触和非接触应用可能性的低温等离子体源及其制备夹层结构的方法
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摘要
Source of low-temperature plasma, particularly for use in medical bio-applications, comprising a source (9) of alternating high voltage, and a hollow insulating body (1), in whose interior space (11) is ended supply of working gas (GAS) and has placed the sandwich structure comprising internal excitation electrode (5) connected to a source (9) of alternating high voltage, where the essence of the invention consists in that the sandwich structure, the internal space (11) consists of mutually superposed layers, conductive upper porous membrane (4), the inner excitation electrodes (5), conductive bottom porous membrane (6) and the outer ground electrode (7), wherein the support of the sandwich structure comprising an upper porous membrane (4), the inner excitation electrode (5) and a lower porous membrane (6) is formed as one solid unit.
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