ABERRATION-CORRECTING METHOD, LASER PROCESSING METHOD USING SAID ABERRATION-CORRECTING METHOD, LASER IRRADIATION METHOD USING SAID ABERRATION-CORRECTING METHOD, ABERRATION-CORRECTING DEVICE AND ABERRATION-CORRECTING PROGRAM

摘要

IN AN ABERRATION-CORRECTING METHOD ACCORDING TO AN EMBODIMENT OF THE PRESENT INVENTION, IN AN ABERRATION-CORRECTING METHOD FOR A LASER IRRADIATION DEVICE (1) WHICH FOCUSES A LASER BEAM ON THE INSIDE OF A TRANSPARENT MEDIUM (60), ABERRATION OF A LASER BEAM IS CORRECTED SO THAT A FOCAL POINT OF THE LASER BEAM IS POSITIONED WITHIN A RANGE OF ABERRATION OCCURRING INSIDE THE MEDIUM (60). THIS ABERRATION RANGE IS NOT LESS THAN NXD AND NOT MORE THAN NXD+ΔS FROM AN INCIDENCE PLANE OF THE MEDIUM (60), PROVIDED THAT THE REFRACTIVE INDEX OF THE MEDIUM (60) IS DEFINED AS N, A DEPTH FROM AN INCIDENCE PLANE OF THE MEDIUM (60) TO THE FOCUS OF THE LENS (50) IS DEFINED AS D, AND ABERRATION CAUSED BY THE MEDIUM (60) IS DEFINED AS ΔS. [FIG 1]