SUBSTRATE HEAT TREATMENT APPARATUS, SUBSTRATE HEAT TREATMENT METHOD, STORAGE MEDIUM AND HEAT-TREATMENT-CONDITION DETECTING APPARATUS

• 1. 一种大直径锯片铁基体热处理设备 [P] . 中国专利： CN208883942U . 2019.05.21
• 2. 一种大直径锯片铁基体热处理设备 [P] . 中国专利： CN108866304A . 2018-11-23
• 3. Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus [P] . 美国专利： US10049905B2 . 2018-08-14

  机译： 基板热处理装置，基板热处理方法，存储介质和热处理状态检测装置

• 4. SUBSTRATE HEAT TREATMENT APPARATUS, SUBSTRATE HEAT TREATMENT METHOD, STORAGE MEDIUM AND HEAT-TREATMENT-CONDITION DETECTING APPARATUS [P] . 美国专利： US2016093519A1 . 2016-03-31

  机译： 基体热处理设备，基体热处理方法，存储介质和热处理状态检测设备

• 5. Substrate heat treatment apparatus, temperature control method for substrate heat treatment apparatus, semiconductor device manufacturing method, temperature control program for substrate heat treatment apparatus, and recording medium [P] . 德国专利： DE112011102676B4 . 2019-01-03

  机译： 基板热处理装置，基板热处理装置的温度控制方法，半导体装置的制造方法，基板热处理装置的温度控制程序以及记录介质

• 1. Effect of Heat Treatment of Al Substrate on GaN Film Electrodeposited in Aqueous Solution [J] . Jae-Wook Kang, Kensuke Kuroda, Masazumi Okido 表面工程材料与先进技术期刊（英文） . 2020,第001期
• 2. SURFACE TREATMENT APPARATUS AND METHOD FOR SURFACE TREATMENT OF PATTERNING DEVICES AND OTHER SUBSTRATES [J] . Research Disclosure . 2020,第677期
• 3. Agency Reviews Patent Application Approval Request for "Method and Apparatus for Selective Substrate Support and Alignment in a Thermal Treatment Chamber" [J] . Robotics and Machine Learning . 2012,第43期
• 4. Application of High-Frequency Induction Heating Apparatus to Heat Treatment of 6061 Aluminum Alloy [J] . Fang-ni Shang, Eiji Sekiya, Yoshihiro Nakayama Materials transactions . 2011,第11期
• 5. Additional heat treatment of non-porous coatings obtained on medium carbon steel substrates by electron beam cladding of a 'Ti-Mo-C' powder composition [C] . D O Mul, E A Drobyaz, T A Zimoglyadova International Conference on Mechanical Engineering, Automation and Control Systems . 2016
• 6. Three-Dimensional Transient Heat Transfer Characterization of Crossflow Minichannel Heat Exchanger Apparatus [D] . ?Ismail, Mohammed 2019
• 7. An apparatus for Application of Heat in the Treatment of Gonorrhea in the Female [O] . H. M. Kanner 1932
• 8. Improved HA Coating on Titanium Substrate Using Induction Heating and Hydrothermal Treatment Methods [O] . Chunli Zou, Xinbo Xiong, Xierong Zeng 2016

• 1. Effect of heat treatment of titanium substrates on the properties of IrO_2-Ta_2O_5 coated anodes [J] . YAN Zhenwei MENG Huimin . 稀有金属：英文版 . 2011,第5期
• 2. Ohmic Contact Formation for n+4H-SiC Substrate by Selective Heating Method Using Hydrogen Radical Irradiation [J] . Tetsuji Arai ,Kazuki Kamimura ,Chiaya Yamamoto . 材料科学与化学工程（英文） . 2017,第1期
• 3. Growth and Chemical Thermodynamics Analysis of SiC Film on Si Substrate by Heating Polystyrene/Silica Bilayer Method [J] . Yun Li ,Yu-xia Wang ,Zheng Chen . 化学物理学报 . 2008,第002期
• 4. Study of ss-DNA Adsorption and Nano-mechanical Properties on Mica Substrate with Surface Forces Apparatus [J] . Gui-Bin Shen ,Ya-Jing Kan ,Min-Hua Chen . 中国机械工程学报 . 2018,第005期
• 5. 高温堆燃料元件基体石墨电化学解体及石墨氧化物热处理研究 [C] . 张庚豫 ,文明芬 ,王树威 . 第十四届全国核化学与放射化学学术研讨会 . 2016
• 6. 马氏体基体TRIP钢的热处理工艺与性能分析 [A] . 徐海涛 . 2008