LIQUID TITANIUM OXIDE COMPOSITIONS, METHODS FOR FORMING THE SAME, AND METHODS FOR ETCHING MATERIAL LAYERS OF OR OVERLYING SUBSTRATES USING THE SAME

摘要

Liquid titanium oxide compositions, methods for forming such compositions, and methods for etching material layers using such compositions are provided. In accordance with an exemplary embodiment, a liquid titanium oxide composition contains a solvent system, an organotitanate, and a high boiling point solvent having a boiling point in the range of about 140° C. to about 400° C.