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AN APPARATUS AND METHOD FOR DIAGNOSTICS OF NEUTRAL RADICALS IN PLASMA
AN APPARATUS AND METHOD FOR DIAGNOSTICS OF NEUTRAL RADICALS IN PLASMA
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机译:等离子体中性自由基诊断的装置和方法
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摘要
An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising: a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe.
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