HIGH-EFFICIENCY MEMS MICRO-VIBRATIONAL ENERGY HARVESTER AND PROCESS FOR MANUFACTURING SAME

摘要

The present invention relates generally to a High Efficiency MEMS Micro- Vibrational Energy Harvester (µVEH) having an thick beam bimorph architecture. The disclosed architecture is capable of producing a voltage of sufficient magnitude such that the requirement to connect a plurality of harvesters in series to produce an adequate voltage magnitude is eliminated.