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GAS MEASUREMENT APPARATUS, MULTIPLE-DEVICE SUBSTRATE, MANUFACTURING METHODS THEREFOR, AND METHODS FOR MANUFACTURING INFRARED LIGHT SOURCE AND PYROELECTRIC INFRARED SENSOR
GAS MEASUREMENT APPARATUS, MULTIPLE-DEVICE SUBSTRATE, MANUFACTURING METHODS THEREFOR, AND METHODS FOR MANUFACTURING INFRARED LIGHT SOURCE AND PYROELECTRIC INFRARED SENSOR
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机译:气体测量装置,多设备基板,其制造方法以及制造红外光源和热释电红外传感器的方法
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摘要
This invention provides the following: a gas measurement apparatus, a multiple-device substrate, an infrared light source, and a pyroelectric infrared sensor that can be manufactured via a simple process; and manufacturing methods therefor. The aforementioned gas measurement apparatus has an infrared light source, a sensor, and a gas cell and is characterized in that: the infrared light source has a first upper electrode, a first intermediate layer, and a first lower electrode; and the sensor has a second upper electrode made of the same material as the first upper electrode, a second intermediate layer made of the same material as the first intermediate layer, and a second lower electrode made of the same material as the first lower electrode.
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